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Title First-principles study of the step oxidation at vicinal Si(001) surfaces
Journal Japanese Journal of Applied Physics 45 (3B): 2144-2147 (3 citation)
Author . D. Yu, K. Park, H. Kim, C.-H. Chung, H. W. Yeom, I. W. Lyo, K.-J. Kong, Y. Miyamoto, O. Sugino, and T. Ohno
Year 2006
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